Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6558559 | Method of manufacturing micromechanical surface structures by vapor-phase etching | Volker Becker, Franz Laermer, Andrea Schilp | 2003-05-06 |
MO
Michael Offenberg
Overall (2003): #155,317 of 273,478Top 60%
1
Patents 2003