Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664737 | Dielectric barrier discharge apparatus and process for treating a substrate | Alan C. Janos, Michael B. Colson | 2003-12-16 |
| 6638875 | Oxygen free plasma stripping process | Qingyan Han, Palani Sakthivel, Ricky Ruffin, Mahmoud Dahimene | 2003-10-28 |
| 6630406 | Plasma ashing process | Carlo Waldfried, Orlando Escorcia, Qingyuan Han, Palani Sakthivel | 2003-10-07 |
| 6605484 | Process for optically erasing charge buildup during fabrication of an integrated circuit | Alan C. Janos, Anthony Sinnot, Kevin Alexander STEWART, Robert Douglas Mohondro | 2003-08-12 |
| 6576300 | High modulus, low dielectric constant coatings | Kyuha Chung, Qingyuan Han, Youfan Liu, Eric Scott Moyer, Michael John Spaulding | 2003-06-10 |
| 6558755 | Plasma curing process for porous silica thin film | Todd Bridgewater, Wei Chen, Qingyuan Han, Eric Scott Moyer, Michael John Spaulding +1 more | 2003-05-06 |
| 6548416 | Plasma ashing process | Qingyuan Han, Palani Sakthivel, Carlo Waldfried | 2003-04-15 |
| 6503366 | Chemical plasma cathode | Joel Penelon | 2003-01-07 |