Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664737 | Dielectric barrier discharge apparatus and process for treating a substrate | Ivan L. Berry, III, Michael B. Colson | 2003-12-16 |
| 6605484 | Process for optically erasing charge buildup during fabrication of an integrated circuit | Anthony Sinnot, Ivan L. Berry, III, Kevin Alexander STEWART, Robert Douglas Mohondro | 2003-08-12 |
| 6597003 | Tunable radiation source providing a VUV wavelength planar illumination pattern for processing semiconductor wafers | Daniel Richardson | 2003-07-22 |
| 6585908 | Shallow angle interference process and apparatus for determining real-time etching rate | Andre Cardoso | 2003-07-01 |
| 6547458 | Optimized optical system design for endpoint detection | Andre Cardoso, Daniel Richardson | 2003-04-15 |