Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6585908 | Shallow angle interference process and apparatus for determining real-time etching rate | Alan C. Janos | 2003-07-01 |
| 6547458 | Optimized optical system design for endpoint detection | Alan C. Janos, Daniel Richardson | 2003-04-15 |