Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663333 | Wafer transport apparatus | David W. Kinnard | 2003-12-16 |
| 6635117 | Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system | David W. Kinnard | 2003-10-21 |
| 6597003 | Tunable radiation source providing a VUV wavelength planar illumination pattern for processing semiconductor wafers | Alan C. Janos | 2003-07-22 |
| 6547458 | Optimized optical system design for endpoint detection | Alan C. Janos, Andre Cardoso | 2003-04-15 |