Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6663333 | Wafer transport apparatus | Daniel Richardson | 2003-12-16 |
| 6635117 | Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system | Daniel Richardson | 2003-10-21 |
| 6537419 | Gas distribution plate assembly for providing laminar gas flow across the surface of a substrate | — | 2003-03-25 |