Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605484 | Process for optically erasing charge buildup during fabrication of an integrated circuit | Alan C. Janos, Anthony Sinnot, Ivan L. Berry, III, Kevin Alexander STEWART | 2003-08-12 |
| 6582891 | Process for reducing edge roughness in patterned photoresist | John Scott Hallock | 2003-06-24 |
| 6503693 | UV assisted chemical modification of photoresist | John Scott Hallock | 2003-01-07 |