PS

Palani Sakthivel

AT Axcelis Technologies: 4 patents #5 of 51Top 10%
📍 Gaithersburg, MD: #9 of 137 inventorsTop 7%
🗺 Maryland: #83 of 2,389 inventorsTop 4%
Overall (2003): #13,667 of 273,478Top 5%
4
Patents 2003

Issued Patents 2003

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
6638875 Oxygen free plasma stripping process Qingyan Han, Ivan L. Berry, III, Ricky Ruffin, Mahmoud Dahimene 2003-10-28
6630406 Plasma ashing process Carlo Waldfried, Ivan L. Berry, III, Orlando Escorcia, Qingyuan Han 2003-10-07
6548416 Plasma ashing process Qingyuan Han, Ivan L. Berry, III, Carlo Waldfried 2003-04-15
6524936 Process for removal of photoresist after post ion implantation John Scott Hallock, Alan F. Becknell 2003-02-25