Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6630406 | Plasma ashing process | Ivan L. Berry, III, Orlando Escorcia, Qingyuan Han, Palani Sakthivel | 2003-10-07 |
| 6558755 | Plasma curing process for porous silica thin film | Ivan L. Berry, III, Todd Bridgewater, Wei Chen, Qingyuan Han, Eric Scott Moyer +1 more | 2003-05-06 |
| 6548416 | Plasma ashing process | Qingyuan Han, Ivan L. Berry, III, Palani Sakthivel | 2003-04-15 |