Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6558755 | Plasma curing process for porous silica thin film | Ivan L. Berry, III, Wei Chen, Qingyuan Han, Eric Scott Moyer, Michael John Spaulding +1 more | 2003-05-06 |
TB
Todd Bridgewater
Axcelis Technologies: 1 patents #20 of 51Top 40%
Overall (2003): #102,115 of 273,478Top 40%
1
Patents 2003