AB

Alan F. Becknell

AT Axcelis Technologies: 1 patents #20 of 51Top 40%
📍 Jessup, MD: #2 of 5 inventorsTop 40%
🗺 Maryland: #543 of 2,389 inventorsTop 25%
Overall (2003): #267,494 of 273,478Top 100%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6524936 Process for removal of photoresist after post ion implantation John Scott Hallock, Palani Sakthivel 2003-02-25