Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665432 | Inspection method and apparatus for the inspection of either random or repeating patterns | David M. Evans, Jason Z. Lin | 2003-12-16 |
| 6560011 | High NA system for multiple mode imaging | Yung-Ho Alex Chuang, David Shafer, J. Joseph Armstrong | 2003-05-06 |
| 6524873 | Continuous movement scans of test structures on semiconductor integrated circuits | Akella V. S. Satya, David L. Adler, Neil Richardson, David J. Walker | 2003-02-25 |