Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665126 | Projection exposure lens with aspheric elements | Wilhelm Ulrich, Helmut Beierl | 2003-12-16 |
| 6646718 | Projection objective having adjacently mounted aspheric lens surfaces | Karl-Heinz Schuster, Wilhelm Ulrich, Helmut Beierl, Wolfgang Singer | 2003-11-11 |
| 6636350 | Microlithographic reduction projection catadioptric objective | Russell Hudyma, Wilhelm Ulrich | 2003-10-21 |
| 6600608 | Catadioptric objective comprising two intermediate images | Alois Herkommer, Karl-Heinz Schuster, Gerd Furter, Rudolf Von Bünau, Wilhelm Ulrich | 2003-07-29 |
| 6590715 | Optical projection system | Wilhelm Ulrich | 2003-07-08 |
| 6560031 | Optical projection lens system | Wilhelm Ulrich | 2003-05-06 |
| 6560011 | High NA system for multiple mode imaging | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai, J. Joseph Armstrong | 2003-05-06 |
| 6512631 | Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system | Yung-Ho Alex Chuang, J. Joseph Armstrong | 2003-01-28 |