Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665126 | Projection exposure lens with aspheric elements | David Shafer, Helmut Beierl | 2003-12-16 |
| 6646718 | Projection objective having adjacently mounted aspheric lens surfaces | Karl-Heinz Schuster, David Shafer, Helmut Beierl, Wolfgang Singer | 2003-11-11 |
| 6636350 | Microlithographic reduction projection catadioptric objective | David Shafer, Russell Hudyma | 2003-10-21 |
| 6611574 | Illumination system with reduced heat load | Wolfgang Singer, Martin Antoni | 2003-08-26 |
| 6600608 | Catadioptric objective comprising two intermediate images | David Shafer, Alois Herkommer, Karl-Heinz Schuster, Gerd Furter, Rudolf Von Bünau | 2003-07-29 |
| 6590715 | Optical projection system | David Shafer | 2003-07-08 |
| 6560031 | Optical projection lens system | David Shafer | 2003-05-06 |