Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6600608 | Catadioptric objective comprising two intermediate images | David Shafer, Alois Herkommer, Karl-Heinz Schuster, Gerd Furter, Wilhelm Ulrich | 2003-07-29 |
| 6593998 | Projection exposure system | Toralf Gruner, Erwin Gaber | 2003-07-15 |
| 6583850 | Optical system | Wolfgang Hummel, Hubert Holderer, Christian Wagner, Jochen Becker, Stefan Xalter | 2003-06-24 |
| 6521877 | Optical arrangement having improved temperature distribution within an optical element | Werner Müller-Rissmann, Hubert Holderer, Christian Wagner, Jochen Becker, Stefan Xalter +1 more | 2003-02-18 |
| 6522392 | Optical systems and methods of compensating rotationally non-symmetrical image defects in an optical system | Werner Müller-Rissmann, Hubert Holderer, Christian Wagner, Jochen Becker, Stefan Xalter +1 more | 2003-02-18 |
| 6504597 | Optical arrangement | Karl-Heinz Schuster, Hubert Holderer, Christian Wagner, Jochen Becker, Stefan Xalter +1 more | 2003-01-07 |