Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6590718 | Projection exposure system having a reflective reticle | Gerd Furter, Uwe Gödecke, Henriette Müller | 2003-07-08 |
| 6583850 | Optical system | Wolfgang Hummel, Hubert Holderer, Rudolf Von Bünau, Jochen Becker, Stefan Xalter | 2003-06-24 |
| 6521877 | Optical arrangement having improved temperature distribution within an optical element | Werner Müller-Rissmann, Hubert Holderer, Rudolf Von Bünau, Jochen Becker, Stefan Xalter +1 more | 2003-02-18 |
| 6522392 | Optical systems and methods of compensating rotationally non-symmetrical image defects in an optical system | Werner Müller-Rissmann, Hubert Holderer, Rudolf Von Bünau, Jochen Becker, Stefan Xalter +1 more | 2003-02-18 |
| 6504597 | Optical arrangement | Karl-Heinz Schuster, Hubert Holderer, Rudolf Von Bünau, Jochen Becker, Stefan Xalter +1 more | 2003-01-07 |