Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6560011 | High NA system for multiple mode imaging | David Shafer, Bin-Ming Benjamin Tsai, J. Joseph Armstrong | 2003-05-06 |
| 6512631 | Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system | David Shafer, J. Joseph Armstrong | 2003-01-28 |