Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6636064 | Dual probe test structures for semiconductor integrated circuits | Akella V. S. Satya, Neil Richardson, Kurt H. Weiner, David J. Walker | 2003-10-21 |
| 6633174 | Stepper type test structures and methods for inspection of semiconductor integrated circuits | Akella V. S. Satya, Neil Richardson, Gustavo A. Pinto, David J. Walker | 2003-10-14 |
| 6610980 | Apparatus for inspection of semiconductor wafers and masks using a low energy electron microscope with two illuminating beams | Lee H. Veneklasen, Matthew S. Marcus | 2003-08-26 |
| 6586733 | Apparatus and methods for secondary electron emission microscope with dual beam | Lee H. Veneklasen | 2003-07-01 |
| 6570154 | Scanning electron beam microscope | Douglas K. Masnaghetti, Stefano E. Concina, Stanley Sun, Waiman Ng | 2003-05-27 |
| 6566885 | Multiple directional scans of test structures on semiconductor integrated circuits | Gustavo A. Pinto, Brian C. Leslie, Akella V. S. Satya, Robert Long, David J. Walker | 2003-05-20 |
| 6528818 | Test structures and methods for inspection of semiconductor integrated circuits | Akella V. S. Satya, Gustavo A. Pinto, Robert Long, Neil Richardson, Kurt H. Weiner +2 more | 2003-03-04 |
| 6524873 | Continuous movement scans of test structures on semiconductor integrated circuits | Akella V. S. Satya, Bin-Ming Benjamin Tsai, Neil Richardson, David J. Walker | 2003-02-25 |