Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667251 | Plasma nitridation for reduced leakage gate dielectric layers | Robert McFadden, Jack T. Kavalieros, Doug Barlage, Robert S. Chau | 2003-12-23 |
| 6667232 | Thin dielectric layers and non-thermal formation thereof | Steven J. Keating, Robert S. Chau, Jack T. Kavalieros, Douglas Barlage | 2003-12-23 |
| 6620713 | Interfacial layer for gate electrode and high-k dielectric layer and methods of fabrication | Robert S. Chau, Mark L. Doczy, Brian Roberds | 2003-09-16 |
| 6617209 | Method for making a semiconductor device having a high-k gate dielectric | Robert S. Chau, Mark L. Doczy | 2003-09-09 |
| 6617210 | Method for making a semiconductor device having a high-k gate dielectric | Robert S. Chau | 2003-09-09 |
| 6610615 | Plasma nitridation for reduced leakage gate dielectric layers | Robert McFadden, Jack T. Kavalieros, Doug Barlage, Robert S. Chau | 2003-08-26 |
| 6597046 | Integrated circuit with multiple gate dielectric structures | Robert S. Chau, Bruce Beattie | 2003-07-22 |
| 6566727 | N2O nitrided-oxide trench sidewalls to prevent boron outdiffusion and decrease stress | Robert S. Chau, Simon Shi-Ning Yang, John Graham | 2003-05-20 |
| 6514879 | Method and apparatus for dry/catalytic-wet steam oxidation of silicon | Robert S. Chau, Ron Dalesky | 2003-02-04 |