Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566727 | N2O nitrided-oxide trench sidewalls to prevent boron outdiffusion and decrease stress | Reza Arghavani, Robert S. Chau, Simon Shi-Ning Yang | 2003-05-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566727 | N2O nitrided-oxide trench sidewalls to prevent boron outdiffusion and decrease stress | Reza Arghavani, Robert S. Chau, Simon Shi-Ning Yang | 2003-05-20 |