Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593633 | Method and device for improved salicide resistance on polysilicon gates | Chia-Hong Jan, Julie Tsai, Tahir Ghani, Kevin A. Whitehill, Steven J. Keating +1 more | 2003-07-15 |
| 6566727 | N2O nitrided-oxide trench sidewalls to prevent boron outdiffusion and decrease stress | Reza Arghavani, Robert S. Chau, John Graham | 2003-05-20 |
| 6521964 | Device having spacers for improved salicide resistance on polysilicon gates | Chia-Hong Jan, Julie Tsai, Tahir Ghani, Kevin A. Whitehill, Steven J. Keating +1 more | 2003-02-18 |
| 6509618 | Device having thin first spacers and partially recessed thick second spacers for improved salicide resistance on polysilicon gates | Chia-Hong Jan, Julie Tsai, Tahir Ghani, Kevin A. Whitehill, Steven J. Keating +1 more | 2003-01-21 |
| 6506652 | Method of recessing spacers to improved salicide resistance on polysilicon gates | Chia-Hong Jan, Julie Tsai, Tahir Ghani, Kevin A. Whitehill, Steven J. Keating +1 more | 2003-01-14 |