Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667251 | Plasma nitridation for reduced leakage gate dielectric layers | Jack T. Kavalieros, Reza Arghavani, Doug Barlage, Robert S. Chau | 2003-12-23 |
| 6610615 | Plasma nitridation for reduced leakage gate dielectric layers | Jack T. Kavalieros, Reza Arghavani, Doug Barlage, Robert S. Chau | 2003-08-26 |
| 6541343 | Methods of making field effect transistor structure with partially isolated source/drain junctions | Anand S. Murthy, Robert S. Chau, Patrick Morrow | 2003-04-01 |