Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653185 | Method of providing trench walls by using two-step etching processes | Martin Gutsche | 2003-11-25 |
| 6620724 | Low resistivity deep trench fill for DRAM and EDRAM applications | Uwe Schroeder, Helmut Tews, Irene McStay, Manfred Hauf, Matthias Goldbach +5 more | 2003-09-16 |