Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653185 | Method of providing trench walls by using two-step etching processes | Harald Seidl | 2003-11-25 |
| 6579758 | Method and installation for fabricating one-sided buried straps | Bernd Gobel, Alfred Kersch, Werner Steinhogl | 2003-06-17 |
| 6559005 | Method for fabricating capacitor electrodes | Alexander Gschwandtner | 2003-05-06 |
| 6548414 | Method of plasma etching thin films of difficult to dry etch materials | Satish D. Athavale | 2003-04-15 |