Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670233 | Methods of patterning a multi-layer film stack and forming a lower electrode of a capacitor | Greg Costrini | 2003-12-30 |
| 6559001 | Methods of patterning a multi-layer film stack and forming a lower electrode of a capacitor | Greg Costrini | 2003-05-06 |
| 6548414 | Method of plasma etching thin films of difficult to dry etch materials | Martin Gutsche | 2003-04-15 |
| 6518118 | Structure and process for buried bitline and single sided buried conductor formation | Ramachandra Divakaruni, Jack A. Mandelman | 2003-02-11 |