Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670233 | Methods of patterning a multi-layer film stack and forming a lower electrode of a capacitor | Satish D. Athavale | 2003-12-30 |
| 6596580 | Recess Pt structure for high k stacked capacitor in DRAM and FRAM, and the method to form this structure | Jingyu Lian, Laertis Economikos, Michael Wise | 2003-07-22 |
| 6559001 | Methods of patterning a multi-layer film stack and forming a lower electrode of a capacitor | Satish D. Athavale | 2003-05-06 |