Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566271 | Method of producing a semiconductor surface covered with fluorine | Gudrun Innertsberger, Andreas Grassl, Barbara Fröschle, Martin Kerber, Alexander Mattheus | 2003-05-20 |
| 6559005 | Method for fabricating capacitor electrodes | Martin Gutsche | 2003-05-06 |