Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660637 | Process for chemical mechanical polishing | Stephanie Delage, Johannes Baumgartl | 2003-12-09 |
| 6649521 | Method for determining the relevant ion and particle flows in i-PVD processes | Alexander Ruf | 2003-11-18 |
| 6579758 | Method and installation for fabricating one-sided buried straps | Bernd Gobel, Martin Gutsche, Werner Steinhogl | 2003-06-17 |
| 6524448 | Configuration for the execution of a plasma based sputter process | Ralf Brinkmann | 2003-02-25 |