Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649441 | Method for fabricating a microcontact spring on a substrate | — | 2003-11-18 |
| 6649521 | Method for determining the relevant ion and particle flows in i-PVD processes | Alfred Kersch | 2003-11-18 |
| 6579786 | Method for depositing a two-layer diffusion barrier | Sven Schmidbauer | 2003-06-17 |