Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6602788 | Process for fabricating an interconnect for contact holes | Axel Bürke, Jens Hahn | 2003-08-05 |
| 6579786 | Method for depositing a two-layer diffusion barrier | Alexander Ruf | 2003-06-17 |