Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6610607 | Method to define and tailor process limited lithographic features using a modified hard mask process | Douglas S. Armbrust, Jed H. Rankin, Sylvia Tousley | 2003-08-26 |
| 6566759 | Self-aligned contact areas for sidewall image transfer formed conductors | Edward W. Conrad, Chung H. Lam, Edmund J. Sprogis | 2003-05-20 |
| 6525371 | Self-aligned non-volatile random access memory cell and process to make the same | Jeffrey B. Johnson, Chung H. Lam, Dana Lee, Jed H. Rankin | 2003-02-25 |