Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6610607 | Method to define and tailor process limited lithographic features using a modified hard mask process | Douglas S. Armbrust, Dale W. Martin, Jed H. Rankin | 2003-08-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6610607 | Method to define and tailor process limited lithographic features using a modified hard mask process | Douglas S. Armbrust, Dale W. Martin, Jed H. Rankin | 2003-08-26 |