Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667136 | Method to control nested to isolated line printing | Orest Bula, Daniel C. Cole, William C. Leipold | 2003-12-23 |
| 6566759 | Self-aligned contact areas for sidewall image transfer formed conductors | Chung H. Lam, Dale W. Martin, Edmund J. Sprogis | 2003-05-20 |
| 6539321 | Method for edge bias correction of topography-induced linewidth variation | James A. Bruce, Orest Bula, William C. Leipold | 2003-03-25 |
| 6528219 | Dynamic alignment scheme for a photolithography system | Paul D. Sonntag, Arthur C. Winslow | 2003-03-04 |