Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6577406 | Structure for lithographic focus control features | Orest Bula, Emily E. Fisch | 2003-06-10 |
| 6539321 | Method for edge bias correction of topography-induced linewidth variation | Orest Bula, Edward W. Conrad, William C. Leipold | 2003-03-25 |