Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627497 | Semiconductor integrated circuit device and method of manufacturing the same | Naruhiko Nakanishi, Nobuyoshi Kobayashi, Sinpei Iijima, Yasuhiro Sugawara, Misuzu Kanai | 2003-09-30 |
| 6583463 | Semiconductor integrated circuit device with information storage capacitor having ruthenium dioxide lower electrode and crystallized TA2O5 capacitor insulator | Naruhiko Nakanishi, Nobuyoshi Kobayashi, Sinpei Iijima, Yasuhiro Sugawara, Misuzu Kanai | 2003-06-24 |
| 6576946 | Semiconductor device comprising capacitor cells, bit lines, word lines, and MOS transistors in a memory cell area over a semiconductor substrate | Misuzu Kanai, Takuya Fukuda, Shinpei Iijima, Ryouichi Furukawa, Yasuhiro Sugawara +1 more | 2003-06-10 |
| 6534375 | METHOD OF FORMING A CAPACITOR IN A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE USING A METAL SILICON NITRIDE LAYER TO PROTECT AN UNDERLYING METAL SILICIDE LAYER FROM OXIDATION DURING SUBSEQUENT PROCESSING STEPS | Shinpei Iijima, Masato Kunitomo, Masahiko Hiratani, Yuichi Matsui, Hiroyuki Ohta +1 more | 2003-03-18 |
| 6524927 | Semiconductor device and method of fabricating the same | Yasuhiro Sugawara, Ryouichi Furukawa, Toshio Uemura, Akira Takamatsu, Hirohiko Yamamoto +3 more | 2003-02-25 |