Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664157 | Semiconductor integrated circuit device and the method of producing the same | Yoshitaka Nakamura, Masahiko Hiratani, Yuichi Matsui, Naruhiko Nakanishi | 2003-12-16 |
| 6653676 | Integrated circuit capacitor | Robert Tsu, Isamu Asano, William R. McKee | 2003-11-25 |
| 6649465 | Process for manufacturing a semiconductor memory device including a memory cell selecting transistor and a capacitor with metal electrodes | Satoshi Yamamoto | 2003-11-18 |
| 6632721 | Method of manufacturing semiconductor devices having capacitors with electrode including hemispherical grains | Satoshi Yamamoto, Jun Kuroda, Hiroshi Miki, Yoshihisa Fujisaki, Tadanori Yoshida +1 more | 2003-10-14 |
| 6576946 | Semiconductor device comprising capacitor cells, bit lines, word lines, and MOS transistors in a memory cell area over a semiconductor substrate | Misuzu Kanai, Yuzuru Ohji, Takuya Fukuda, Ryouichi Furukawa, Yasuhiro Sugawara +1 more | 2003-06-10 |
| 6544835 | Method of forming a ruthenium film by CVD | Satoshi Yamamoto | 2003-04-08 |
| 6544834 | Method of forming a semiconductor device including a capacitor with tantalum oxide (Ta2O5) | Yasuhiro Sugawara, Yuzuru Oji, Naruhiko Nakanishi, Misuzu Kanai, Masahiko Hiratani | 2003-04-08 |
| 6534375 | METHOD OF FORMING A CAPACITOR IN A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE USING A METAL SILICON NITRIDE LAYER TO PROTECT AN UNDERLYING METAL SILICIDE LAYER FROM OXIDATION DURING SUBSEQUENT PROCESSING STEPS | Yuzuru Ohji, Masato Kunitomo, Masahiko Hiratani, Yuichi Matsui, Hiroyuki Ohta +1 more | 2003-03-18 |