Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638811 | Method of manufacturing a semiconductor integrated circuit device having a capacitor | Masayoshi Saito, Yoshitaka Nakamura, Hidekazu Goto, Keizo Kawakita, Satoru Yamada +8 more | 2003-10-28 |
| 6576946 | Semiconductor device comprising capacitor cells, bit lines, word lines, and MOS transistors in a memory cell area over a semiconductor substrate | Misuzu Kanai, Yuzuru Ohji, Shinpei Iijima, Ryouichi Furukawa, Yasuhiro Sugawara +1 more | 2003-06-10 |
| 6509277 | Method of manufacturing semiconductor integrated circuit device having insulatro film formed from liquid containing polymer of silicon, oxygen, and hydrogen | Masayoshi Saito, Katsuhiko Hotta, Masayoshi Hirasawa, Masayuki Kojima, Hiroyuki Uchiyama +1 more | 2003-01-21 |