Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664157 | Semiconductor integrated circuit device and the method of producing the same | Shinpei Iijima, Yoshitaka Nakamura, Masahiko Hiratani, Naruhiko Nakanishi | 2003-12-16 |
| 6555429 | Method of manufacturing semiconductor devices utilizing underlayer-dependency of deposition of capacitor electrode film, and semiconductor device | Masahiko Hiratani, Yasuhiro Shimamoto, Yoshitaka Nakamura, Toshihide Nabatame | 2003-04-29 |
| 6534375 | METHOD OF FORMING A CAPACITOR IN A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE USING A METAL SILICON NITRIDE LAYER TO PROTECT AN UNDERLYING METAL SILICIDE LAYER FROM OXIDATION DURING SUBSEQUENT PROCESSING STEPS | Shinpei Iijima, Yuzuru Ohji, Masato Kunitomo, Masahiko Hiratani, Hiroyuki Ohta +1 more | 2003-03-18 |
| 6521494 | Method of manufacturing semiconductor devices utilizing underlayer-dependency of deposition of capacitor electrode film, and semiconductor device | Masahiko Hiratani, Yasuhiro Shimamoto, Yoshitaka Nakamura, Toshihide Nabatame | 2003-02-18 |
| 6503791 | Method of manufacturing semiconductor devices utilizing underlayer-dependency of deposition of capacitor electrode film, and semiconductor device | Masahiko Hiratani, Yasuhiro Shimamoto, Yoshitaka Nakamura, Toshihide Nabatame | 2003-01-07 |