Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6555429 | Method of manufacturing semiconductor devices utilizing underlayer-dependency of deposition of capacitor electrode film, and semiconductor device | Yuichi Matsui, Masahiko Hiratani, Yasuhiro Shimamoto, Yoshitaka Nakamura | 2003-04-29 |
| 6548342 | Method of producing oxide dielectric element, and memory and semiconductor device using the element | Takaaki Suzuki, Kazutoshi Higashiyama | 2003-04-15 |
| 6521494 | Method of manufacturing semiconductor devices utilizing underlayer-dependency of deposition of capacitor electrode film, and semiconductor device | Yuichi Matsui, Masahiko Hiratani, Yasuhiro Shimamoto, Yoshitaka Nakamura | 2003-02-18 |
| 6503791 | Method of manufacturing semiconductor devices utilizing underlayer-dependency of deposition of capacitor electrode film, and semiconductor device | Yuichi Matsui, Masahiko Hiratani, Yasuhiro Shimamoto, Yoshitaka Nakamura | 2003-01-07 |