Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6562695 | Semiconductor integrated circuit device and method of manufacturing involving the scale-down width of shallow groove isolation using round processing | Norio Suzuki, Hiroyuki Ichizoe, Masayuki Kojima, Keiji Okamoto, Shinichi Horibe +6 more | 2003-05-13 |
| 6559027 | Semiconductor device and process for producing the sme | Norio Ishitsuka, Hideo Miura, Shuji Ikeda, Norio Suzuki, Yasushi Matsuda +7 more | 2003-05-06 |
| 6524927 | Semiconductor device and method of fabricating the same | Yasuhiro Sugawara, Ryouichi Furukawa, Toshio Uemura, Hirohiko Yamamoto, Tadanori Yoshida +3 more | 2003-02-25 |