Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639263 | Semiconductor device with copper wiring connected to storage capacitor | Hideo Miura, Hiroyuki Ohta, Tomio Iwasaki, Isamu Asano | 2003-10-28 |
| 6534375 | METHOD OF FORMING A CAPACITOR IN A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE USING A METAL SILICON NITRIDE LAYER TO PROTECT AN UNDERLYING METAL SILICIDE LAYER FROM OXIDATION DURING SUBSEQUENT PROCESSING STEPS | Shinpei Iijima, Yuzuru Ohji, Masato Kunitomo, Masahiko Hiratani, Yuichi Matsui +1 more | 2003-03-18 |
| 6521932 | Semiconductor device with copper wiring connected to storage capacitor | Hideo Miura, Hiroyuki Ohta, Tomio Iwasaki, Isamu Asano | 2003-02-18 |