Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653165 | Methods of forming semiconductor element, and semiconductor elements | Takaharu Kondo, Masafumi Sano, Akira Sakai, Koichi Matsuda, Yuzo Koda | 2003-11-25 |
| 6602347 | Apparatus and method for processing a substrate | Hiroshi Shimoda, Masahiro Kanai, Hirokazu Ohtoshi, Koichiro Moriyama | 2003-08-05 |
| 6576061 | Apparatus and method for processing a substrate | Koichiro Moriyama, Masahiro Kanai, Hirokazu Ohtoshi, Naoto Okada, Hiroshi Shimoda +1 more | 2003-06-10 |
| 6547922 | Vacuum-processing apparatus using a movable cooling plate during processing | Masahiro Kanai, Koichiro Moriyama, Hiroshi Shimoda, Hiroyuki Ozaki | 2003-04-15 |
| 6530341 | Deposition apparatus for manufacturing thin film | Yuzo Kohda, Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tomonori Nishimoto +1 more | 2003-03-11 |