Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653165 | Methods of forming semiconductor element, and semiconductor elements | Takaharu Kondo, Akira Sakai, Koichi Matsuda, Yuzo Koda, Tadashi Hori | 2003-11-25 |
| 6645573 | Process for forming a microcrystalline silicon series thin film and apparatus suitable for practicing said process | Makoto Higashikawa | 2003-11-11 |
| 6635899 | Semiconductor element having microcrystalline grains and manufacturing method thereof | Keishi Saito | 2003-10-21 |
| 6613603 | Photovoltaic device, process for production thereof, and zinc oxide thin film | — | 2003-09-02 |