Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645573 | Process for forming a microcrystalline silicon series thin film and apparatus suitable for practicing said process | Masafumi Sano | 2003-11-11 |
MH
Makoto Higashikawa
Overall (2003): #166,686 of 273,478Top 65%
1
Patents 2003