Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667240 | Method and apparatus for forming deposited film | Masahiro Kanai, Naoto Okada, Koichiro Moriyama, Hiroshi Shimoda | 2003-12-23 |
| 6653430 | Butadiene polymers and process for producing conjugated diene polymers | Kazuo Soga, Michihiko Asai, Yasuzo Suzuki, Akira Miyazawa, Kenji Tsuchihara +6 more | 2003-11-25 |
| 6576061 | Apparatus and method for processing a substrate | Koichiro Moriyama, Masahiro Kanai, Hirokazu Ohtoshi, Tadashi Hori, Naoto Okada +1 more | 2003-06-10 |
| 6547922 | Vacuum-processing apparatus using a movable cooling plate during processing | Tadashi Hori, Masahiro Kanai, Koichiro Moriyama, Hiroshi Shimoda | 2003-04-15 |