Issued Patents 2003
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667240 | Method and apparatus for forming deposited film | Hiroyuki Ozaki, Naoto Okada, Koichiro Moriyama, Hiroshi Shimoda | 2003-12-23 |
| 6654282 | Nonvolatile semiconductor memory device | — | 2003-11-25 |
| 6638359 | Deposited film forming apparatus and deposited film forming method | Takahiro Yajima, Takeshi Shishido | 2003-10-28 |
| 6632284 | Apparatus and method for forming deposited film | Takeshi Shishido, Yuzo Koda, Takahiro Yajima | 2003-10-14 |
| 6602347 | Apparatus and method for processing a substrate | Hiroshi Shimoda, Hirokazu Ohtoshi, Tadashi Hori, Koichiro Moriyama | 2003-08-05 |
| 6587380 | Programming method for non-volatile semiconductor memory device | Teruhiko Kamei | 2003-07-01 |
| 6587381 | Programming method for non-volatile semiconductor memory device | Teruhiko Kamei | 2003-07-01 |
| 6576061 | Apparatus and method for processing a substrate | Koichiro Moriyama, Hirokazu Ohtoshi, Tadashi Hori, Naoto Okada, Hiroshi Shimoda +1 more | 2003-06-10 |
| 6562400 | Method and apparatus for forming deposition film, and method for treating substrate | Hideo Tamura, Yasuyoshi Takai, Hiroshi Shimoda, Hidetoshi Tsuzuki | 2003-05-13 |
| 6551471 | Ionization film-forming method and apparatus | Hirohito Yamaguchi, Atsushi Koike, Katsunori Oya | 2003-04-22 |
| 6547922 | Vacuum-processing apparatus using a movable cooling plate during processing | Tadashi Hori, Koichiro Moriyama, Hiroshi Shimoda, Hiroyuki Ozaki | 2003-04-15 |
| 6531654 | Semiconductor thin-film formation process, and amorphous silicon solar-cell device | Shuichiro Sugiyama, Takahiro Yajima | 2003-03-11 |
| 6530341 | Deposition apparatus for manufacturing thin film | Yuzo Kohda, Shotaro Okabe, Akira Sakai, Tadashi Hori, Tomonori Nishimoto +1 more | 2003-03-11 |
| 6526910 | Apparatus and method for forming a deposited film by means of plasma CVD | Takahiro Yajima, Takeshi Shishido | 2003-03-04 |