Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6530341 | Deposition apparatus for manufacturing thin film | Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Hori, Tomonori Nishimoto +1 more | 2003-03-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6530341 | Deposition apparatus for manufacturing thin film | Shotaro Okabe, Masahiro Kanai, Akira Sakai, Tadashi Hori, Tomonori Nishimoto +1 more | 2003-03-11 |