Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667240 | Method and apparatus for forming deposited film | Hiroyuki Ozaki, Masahiro Kanai, Naoto Okada, Koichiro Moriyama | 2003-12-23 |
| 6602347 | Apparatus and method for processing a substrate | Masahiro Kanai, Hirokazu Ohtoshi, Tadashi Hori, Koichiro Moriyama | 2003-08-05 |
| 6576061 | Apparatus and method for processing a substrate | Koichiro Moriyama, Masahiro Kanai, Hirokazu Ohtoshi, Tadashi Hori, Naoto Okada +1 more | 2003-06-10 |
| 6562400 | Method and apparatus for forming deposition film, and method for treating substrate | Hideo Tamura, Masahiro Kanai, Yasuyoshi Takai, Hidetoshi Tsuzuki | 2003-05-13 |
| 6547922 | Vacuum-processing apparatus using a movable cooling plate during processing | Tadashi Hori, Masahiro Kanai, Koichiro Moriyama, Hiroyuki Ozaki | 2003-04-15 |