Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652713 | Pedestal with integral shield | Karl M. Brown, Vineet Haresh Mehta, See-Eng Phan, Allen Lau | 2003-11-25 |
| 6557248 | Method of fabricating an electrostatic chuck | Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Chandra Deshpandey, Alfred Goldspeil +2 more | 2003-05-06 |