Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652713 | Pedestal with integral shield | Vineet Haresh Mehta, See-Eng Phan, Semyon Sherstinsky, Allen Lau | 2003-11-25 |
| 6620296 | Target sidewall design to reduce particle generation during magnetron sputtering | James Gogh, Jim Thompson, Marc Schweitzer, Yoichiro Tanaka, Alan Liu +2 more | 2003-09-16 |
| 6567257 | Method and apparatus for conditioning an electrostatic chuck | — | 2003-05-20 |
| 6563686 | Pedestal assembly with enhanced thermal conductivity | Cheng-Hsiung Tsai, Thomas Brezoczky | 2003-05-13 |